S8552

`Reliable detection improves of ArF excimer laser (=193 nm)
` Large active area S8551: 5.8 * 5.8 mm S8552: 10 * 10 mm S8553: 18 * 18 mm
`Windowless package S8551: TO-8 metal package S8552: 16.5 * 15.0 mm ceramic package S8553: 25.5 * 25.5 mm ceramic package

S8551, S8552 and S8553 are VUV (Vacuum UV) photodiodes suitable for detection of ArF excimer lasers (=193 nm). S8551, S8552 and S8553 is designed to provide optimal performance in the VUV range, these photodiodes offer more stable sensitivity even after long exposure to VUV radiation compared with conventional types.