Features: ` Highly stable sensitivity and dark current against ArF excimer laser radiation (=193 nm)` Hermetically sealed metal package with quartz window` Large active area: S9682: 5.8 * 5.8 mm (TO-8 metal package) S9683: 10 * 10 mm (1 inch metal package)Application·ArF excimer laser detection·UV...
S9683: Features: ` Highly stable sensitivity and dark current against ArF excimer laser radiation (=193 nm)` Hermetically sealed metal package with quartz window` Large active area: S9682: 5.8 * 5.8 mm (TO...
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Parameter |
Symbol |
Value |
Unit |
Reverse voltage |
VR Max. |
5 |
V |
Operating temperature |
Topr |
-40 to +100 |
|
Storage temperature |
Tstg |
-55 to +125 |
S9682 and S9683 are Si photodiodes specifically designed to detect VUV (vacuum ultraviolet) radiation with high reliability. These S9682 and S9683 photodiodes are hermetically sealed in a metal package with a quartz window. There is no outgassing from the inside of the package, eliminating the cause of decrease in VUV sensitivity.