Features: ` Uncompensated pressure sensor die ` Linearity 0.15% (typical)` Output Span 392mV @ 5V ` Die Size 1.72 x 1.58mm` Temperature Range -40°.+125°C ` Low Cost, High reliabilityApplication· For absolute pressure sensor systems· Tire pressure measurements· Electronic scalesSpecifications ...
MS767: Features: ` Uncompensated pressure sensor die ` Linearity 0.15% (typical)` Output Span 392mV @ 5V ` Die Size 1.72 x 1.58mm` Temperature Range -40°.+125°C ` Low Cost, High reliabilityApplication· For...
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Parameter | Symbol | Conditions | Min |
Max |
Unit |
Supply voltage | VS+ | Ta = 25 |
20 |
V | |
Storage temperature | TS | -40 |
+150 |
| |
Pressure overload |
35 |
Bar |
The sensor element of the MS767 consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. It is available as an absolute sensor (MS767A) where a sealed vacuum cavity underneath the membrane is used as reference pressure.