HSH1500PILO

Application

• Microlithography


Description

PerkinElmer Optoelectronics is a leading manufacturer of mercury short arc lamps ranging in output power from 1000 to 8000 watts. These lamps are used in the production of printed circuit boards, liquid crystal displays and semiconductors. The HSH1500PILO Series lamps are used worldwide in microlithography systems manufactured by ASML, Canon, GCA, Nikon, Karl Suss, Ultratech Stepper, and SVG. With extremely high stability, uniform output distribution and extended lamp lifetimes, the HSH Series has become the lamp choice of many of the world's leading semiconductor manufacturers.

PerkinElmer has been a leading manufacturer of high intensity arc lamps HSH1500PILO for more than 30 years and is a premier lamp supplier for solid state lasers, medical equipment, NASA space systems and microlithography. PerkinElmer has steadily advanced lamp performance from 1000 watts to 8000 watts. With the introduction of new materials and proprietary manufacturing processes, we have extended lamp lifetimes form several hundred hours to more than two thousand hours.

The HSH1500PILO  Series provides longer lifetimes, outstanding uniformity, and excellent spectral quality which results in increased throughput, reduced downtime and an overall reduction in the cost of ownership.