Features: ·Ultra Thin Type: 2.5 mm (Max.) • Detection at closed distance from samples ·Flexible Lead Out (polymide film) • Easy system design with a flexible wiring • Low outguessing for high vacuum operation ·Light WeightApplication ·SEM ·FIB System ·Mask Aligner ·Electron Be...
F6589: Features: ·Ultra Thin Type: 2.5 mm (Max.) • Detection at closed distance from samples ·Flexible Lead Out (polymide film) • Easy system design with a flexible wiring • Low outgue...
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Parameter |
Value |
Unit |
MCP Supply Voltage (In-Out) |
2.0 |
kV |
MCP Out-Anode Voltage |
0.4 |
kV |
Anode-Substrate Voltage |
2.4 |
kV |
Operating Vacuum Condition |
Less than 6.7*10 -4 (5*10 -6) |
Pa (Torr) |
Ambient Temperature |
-50 to +70 |
|
Baking Temperature |
200 |
|
Baking Time |
8 |
hours |
Vacuum Condition for Baking |
Less than 6.7* 10 -4 (5*10 -6) |
Pa (Torr) |