Cascade Microtech Announced the InfinityQuad Probe

Published:2011/10/16 21:32:00 Author:Phyllis From:SeekIC

Cascade Microtech, Inc., a leading expert at enabling precision measurements of integrated circuits at the wafer level, has developed the InfinityQuad probe to ensure reliable measurement results up to 110 GHz in the engineering and production of DC, logic, RF and mmWave RFIC devices.

InfinityQuad, a multi-contact quadrant probe, is built on a fabricated coupon tip technology and is fully configurable with up to 25 contacts defined as DC, logic, ground, RF and mm-wave with an array of standard pitches. The probe uses the same technology as the Infinity Probes and Pyramid-MW probe cards and uses a photo-lithographically defined fine-pitch tip structure to enable automatic, over-temperature probing of pads as small as 30 μm x 50 μm with minimum pad damage, and provides consistent, low contact resistance. Fine-pitch probe tips enable probing of pitches as small as 75 μm.

The technology used in the probe enables customization of up to 25 contacts for ground, power, logic, RF or mm-wave contacts to 110 GHz, and enables probing of 30 um x 50 um pads at fine pitches over a temperature range of -40 to +125℃ with minimal pad damage. The InfinityQuad delivers repeatable, accurate measurement of ICs, transistor or device arrays and test structures with low contact resistance on aluminum, copper or gold pads. The InfinityQuad probe is the only probe technology that allows automated testing of automotive radar and other advanced devices with multiple mm-wave signals as well as many lower frequency signals, power and control lines.

The InfinityQuad provides microstrip transmission lines to probe tip, high density of signals and DC/logic, tight pitch signals and superior fringing control and overall RF performance. The contact area is 12 x 8 μm and the first to last overtravel is 10 μm as well as a less than 50 W contact resistance and parallel skating. The tips are all skating in parallel to each other, there is zero side skate. Probe life is quoted as over 250,000 cycles with minimal maintenance.

The number of contacts is from 4 to 25 and the number of ‘premium’ channels is up to four 40, 50, 67 or 110 GHz and the available contact pitch is 75, 80, 100, 125, 150, 200 and 250 μm.

The InfinityQuad enhanced probe mount includes a method to accurately adjust the yaw-axis to ensure the probe correctly aligns to the pads. This method is more simple and precise to set up, saving time and improving probing accuracy.

About Cascade Microtech, Inc

Cascade Microtech, Inc. is a worldwide leader in precision contact, electrical measurement and test of integrated circuits, optical devices and other small structures. For technology businesses and scientific institutions that need to evaluate small structures, Cascade Microtech delivers access to electrical data from wafers, ICs, IC packages, circuit boards and modules, MEMS, 3D TSV, LED devices and more. Cascade Microtech’s leading-edge stations, probes, probe cards and integrated systems deliver precision accuracy and superior performance both in the lab and during production manufacturing of high-speed and high-density semiconductor chips.

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